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Journal of Micromechanics and Microengineering latest papers



Journal of Micromechanics and Microengineering is a leading journal in its field, covering all aspects of microelectromechanichal systems, devices and structures as well as micromechanics, microengineering and microfabrication. The journal publishes key



Published: Thu, 01 Jan 1970 00:00:00 GMT

Last Build Date: Thu, 01 Jan 1970 00:00:00 GMT

Copyright: Copyright © IOP Publishing 2011
 



A cellular-automata and particle-tracking simulation of abrasive jet micromachining of polymethyl-methacrylate

Mon, 11 Jul 2011 23:00:00 GMT

Author(s): D Ciampini and M Papini
Affiliation(s): Department of Mechanical and Industrial Engineering, Ryerson University, 350 Victoria Street, Toronto, ON, Canada M5B 2K3



In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators

Mon, 11 Jul 2011 23:00:00 GMT

Author(s): B P Harrington and R Abdolvand
Affiliation(s): Department of Electrical and Computer Engineering, Oklahoma State University, 700 N Greenwood Ave, Tulsa, OK, USA



Analysis and characterization of demolding of hot embossed polymer microstructures

Mon, 11 Jul 2011 23:00:00 GMT

Author(s): Matthew E Dirckx and David E Hardt
Affiliation(s): Lab for Manufacturing and Productivity, Massachusetts Institute of Technology, 77 Massachusetts Ave., Cambridge, MA 02139, USA



50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection

Mon, 11 Jul 2011 23:00:00 GMT

Author(s): P Ivaldi, J Abergel, M H Matheny, L G Villanueva, R B Karabalin, M L Roukes, P Andreucci, S Hentz and E Defay
Affiliation(s): CEA-LETI, MINATEC Campus, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France; Kavli Nanoscience Institute, California Institute of Technology, Pasadena, CA 91125, USA



Fabrication of a double-sided micro-lens array by a glass molding technique

Mon, 11 Jul 2011 23:00:00 GMT

Author(s): Chien-Yao Huang, Wen-Tse Hsiao, Kuo-Cheng Huang, Keng-Souo Chang, Hsiao-Yu Chou and Chang-Pin Chou
Affiliation(s): System Control and Integration Division, Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan; Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan



A self-adaptive thermal switch array for rapid temperature stabilization under various thermal power inputs

Sun, 10 Jul 2011 23:00:00 GMT

Author(s): Xiaobao Geng, Pragnesh Patel, Amitabh Narain and Dennis Desheng Meng
Affiliation(s): Multi-Scale Energy System (MuSES) Laboratory, Department of Mechanical Engineering, Engineering Mechanics, Michigan Technological University, 815 R L Smith Building, 1400 Townsend Drive, Houghton, MI 49931, USA



Improvements in electrical properties of piezoelectric microcantilever sensors by reducing parasitic effects

Sun, 10 Jul 2011 23:00:00 GMT

Author(s): Sangkyu Lee, Yeolho Lee, Haksue Lee and Wonkyu Moon
Affiliation(s): Department of Mechanical Engineering, Pohang University of Science and Technology, Hyoja-dong San 31, Pohang 790-784, Korea; Corporate Technology Operations SAIT, Samsung Electronics Co., Ltd, Korea; 6th R&D Institute, Agency for Defense Development, Jinhae, Korea



A poly(vinylidene fluoride)-coated ZnO film bulk acoustic resonator for nerve gas detection

Sun, 10 Jul 2011 23:00:00 GMT

Author(s): Da Chen, Jingjing Wang, Dehua Li, Yijian Liu, Hongwei Song and Qixin Liu
Affiliation(s): Department of Applied Physics, Qingdao Key Laboratory of Terahertz Technology, College of Science, Shandong University of Science and Technology, Qingdao 266510, People's Republic of China; Jinan campus, Shandong University of Science and Technology, Jinan 250031, People's Republic of China



Fabrication of strongly anchored, high aspect ratio elastomeric microwires for mechanical and optical applications

Sun, 10 Jul 2011 23:00:00 GMT

Author(s): Jiwon Lee and Jaeyoun Kim
Affiliation(s): Department of Electrical and Computer Engineering, Iowa State University, Ames, IA, USA



A microfluidic chip for blood plasma separation using electro-osmotic flow control

Sun, 10 Jul 2011 23:00:00 GMT

Author(s): Hai Jiang, Xuan Weng, Chan Hee Chon, Xudong Wu and Dongqing Li
Affiliation(s): Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, Ontario, N2L 3G1, Canada